PRECESS  L-Motion 移位傳輸門閥

---SPTVL 系列（V74系列）

The SPTVL Transfer Valve suited for corrosive processes such as etch or CVD, the technology of L-motion of the gate by a single-shaft pneumatic actuator. In a L-motion, the gate is moved vertically into close position – without any contact to the valve body – and in the final movement it is pushed horizontally to the gate seat, with the seal touching the gate seat with a fixed force, related to the connected air pressure.SPTVL傳輸閥適用于腐蝕工藝，如蝕刻或 CVD，通過(guò)單軸氣動(dòng)執(zhí)行器對(duì)閘門進(jìn)行 L 型運(yùn)動(dòng)的技術(shù)。在 L 型運(yùn)動(dòng)中，閘門垂直移動(dòng)到接近位置 - 不與閥體有任何接觸 - 在最后的運(yùn)動(dòng)中，它被水平推到閘閥座上，密封件以與連接的氣壓相關(guān)的固定力接觸閘閥座。

To minimize particle generation and activation, the gates are fitted with vulcanized seals. This is a highly reliable and more durable sealing solution then a standard O-ring sealing, although standard O-ring sealing is available as an option. The shaft feedthrough is sealed with highly durable metal welded bellows.為了最大限度地減少顆粒的產(chǎn)生和生成，閘門配有閥板配備了硫化密封件。這是一種高度可靠且更耐用的密封解決方案，而不是標(biāo)準(zhǔn) O 形圈密封，盡管標(biāo)準(zhǔn) O 形圈密封可作為選項(xiàng)提供。軸饋入裝置采用高度耐用的金屬焊接波紋管密封。

In case of power failure, the SPTVL can be mechanically locked in close and open position.在停電的情況下，SPTVL 可以機(jī)械鎖定在關(guān)閉和打開位置。

Already installed in hundreds of demanding applications in various semiconductor, Solar and Industry production processes, the SPTVL series has proven its outstanding reliability. With a robust design as well as reduced and easy maintenance, the SPTVL series convinces in all aspects.SPTVL 系列已經(jīng)安裝在各種半導(dǎo)體、太陽(yáng)能和工業(yè)生產(chǎn)過(guò)程中的數(shù)百個(gè)要求苛刻的應(yīng)用中，證明了其出色的可靠性。憑借堅(jiān)固的設(shè)計(jì)以及減少和易于維護(hù)，SPTVL 系列在各個(gè)方面都令人信服。

The SPTVL Transfer Valve is always tailored to customer specifications. Nevertheless, four basic design types are predefined: two valve types with different rear side openings and two insert types with inside or outside chamber valve seat.SPTVL 傳輸閥始終根據(jù)客戶規(guī)格量身定制。盡管如此，仍預(yù)定義了四種基本設(shè)計(jì)類型：兩種具有不同后側(cè)開口的閥類型和兩種帶內(nèi)腔或外腔閥座的插入類型。

The valve body material options are aluminum, hard anodized, nickel-plated or stainless steel. Gate and bonnet seals are in FKM or FFKM. Other sealing materials are available on request.閥體材料選項(xiàng)為鋁、硬質(zhì)陽(yáng)極氧化、鍍鎳或不銹鋼。閘門和閥蓋密封件為 FKM 或 FFKM。可根據(jù)要求提供其他密封材料。

MAIN FEATURES主要特征：

Semi standard application(Semi E21- 94 Semi E24-92 Semi- E21.1-1296)

半標(biāo)準(zhǔn)應(yīng)用（Semi E21- 94 Semi E24-92 Semi- E21.1-1296）

Patented L-motion link and dual shifts without springs in the actuator enable faster獲得zhuanli的 L 型運(yùn)動(dòng)連桿和執(zhí)行器中無(wú)彈簧的雙移位可實(shí)現(xiàn)更快的速度

smoother actuation with significantly reduced vibration驅(qū)動(dòng)更平穩(wěn)，振動(dòng)顯著減少

Single pneumatic actuator單個(gè)氣動(dòng)執(zhí)行器

Benefits優(yōu)勢(shì)：

Mechanical lock at the close position關(guān)閉位置的機(jī)械鎖

Welded bellows actuator seal焊接波紋管驅(qū)動(dòng)器密封件

Bonnet flange bolts are designed with retainers to eliminate bolts from falling out upon disassembly閥蓋法蘭螺栓設(shè)計(jì)有固定器，可防止螺栓在拆卸時(shí)脫落

APPLICATIONS應(yīng)用：

•        Semiconductor processing半導(dǎo)體制成

•        Plasma Etch, CVD, sputter deposition刻蝕、CVD、濺射沉積

•        Manufacturing of solar panels太陽(yáng)能電池制造

•        LCD/flat panel process LCD顯示液晶面板制造

•        All other cluster vacuum systems所有真空傳輸系統(tǒng)

對(duì)應(yīng)VAT閥門型號(hào)：04.2、04.3、05.2、05.3系列 L-MOTION傳輸門閥

SPTVL 系列（V74系列）L-Motion移位傳輸門閥訂貨選項(xiàng)

PRECESS  L-Motion 移位傳輸門閥閥技術(shù)參數(shù)